MEMS devices for high isolation switching and tunable filtering Conference Paper

abstract

• This paper presents resonant capacitive microelectromechanical switches and their possible applications in tunable filtering. Single switches with a down capacitance of 2.9 pF and inductive sections of 3 to 50 pH are demonstrated, resulting in resonant frequencies from 13 to 54 GHz. Designs of resonant switches connected in parallel are also implemented with major advantages in isolation and bandwidth. Finally, tunable filters using these switches are discussed.

name of conference

• 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017)

authors

• Katehi, Linda

published proceedings

• 2000 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

author list (cited authors)

• Peroulis, D., Pacheco, S., Sarabandi, K., & Katehi, L.

complete list of authors

• Peroulis, D||Pacheco, S||Sarabandi, K||Katehi, LPB

publication date

• January 2000

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 13 To 54 Ghz
• 2.9 Pf
• Bandwidth
• Capacitance
• Circuit Tuning
• Coplanar Waveguide Components
• Coplanar Waveguides
• Down Capacitance
• Geometry
• High Isolation Switching
• Inductance
• Inductive Sections
• Isolation
• Joining Processes
• Mems Devices
• Microelectromechanical Devices
• Micromechanical Devices
• Microwave Filters
• Microwave Switches
• Millimetre Wave Filters
• Packet Switching
• Resonance
• Resonant Capacitive Microelectromechanical Switches
• Resonant Frequencies
• Resonant Switches
• Semiconductor Switches
• Switches
• Tunable Filtering

International Standard Book Number (ISBN) 10

• 0-7803-5687-X

start page

• 1217

end page

• 1220

volume

• 2