MEMS devices for high isolation switching and tunable filtering Conference Paper uri icon

abstract

  • This paper presents resonant capacitive microelectromechanical switches and their possible applications in tunable filtering. Single switches with a down capacitance of 2.9 pF and inductive sections of 3 to 50 pH are demonstrated, resulting in resonant frequencies from 13 to 54 GHz. Designs of resonant switches connected in parallel are also implemented with major advantages in isolation and bandwidth. Finally, tunable filters using these switches are discussed.

name of conference

  • 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017)

published proceedings

  • 2000 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

author list (cited authors)

  • Peroulis, D., Pacheco, S., Sarabandi, K., & Katehi, L.

complete list of authors

  • Peroulis, D||Pacheco, S||Sarabandi, K||Katehi, LPB

publication date

  • January 1, 2000 11:11 AM