RF MEMS for high-frequency applications Conference Paper

abstract

• RF MEMS has been identified as an area, which has the potential to provide a major impact on existing system architectures in sensors and communications by reducing weight, cost, size, and power dissipation by a few orders of magnitude. Key MEMS devices for current RF architectures are switches in radar systems and filters in communication systems. This paper discusses a new family of MEMS switches and Si-micromachined circuits appropriate for use in modern communications systems.

name of conference

• 2000 Asia-Pacific Microwave Conference. Proceedings (Cat. No.00TH8522)

authors

• Katehi, Linda

published proceedings

• 2000 Asia-Pacific Microwave Conference. Proceedings (Cat. No.00TH8522)

author list (cited authors)

• Katehi, L., & Perlman, B. S.

citation count

• 1

complete list of authors

• Katehi, LPB||Perlman, BS

publication date

• January 2000

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• Communication Switching
• Communications
• Costs
• Elemental Semiconductors
• Hf Applications
• High-frequency Applications
• Mems Switches
• Microelectromechanical Devices
• Micromachining
• Micromechanical Devices
• Microwave Circuits
• Microwave Switches
• Millimetre Wave Circuits
• Power Dissipation
• Radar
• Radio Frequency
• Radiofrequency Identification
• Radiofrequency Microelectromechanical Systems
• Rf Architectures
• Rf Mems
• Sensor Systems
• Sensors
• Si
• Si-micromachined Circuits
• Silicon
• Switches
• System Architectures

Digital Object Identifier (DOI)

• 10.1109/apmc.2000.925944

start page

• 763

end page

• 766

URL

• http://dx.doi.org/10.1109/apmc.2000.925944