Wide Band Series Switch Fabricated Using Metal As Sacrificial layer Conference Paper

abstract

• Series switches with metal-to-metal contact have been fabricated to operate from dc to 40 GHz. The insertion loss has been measured to be less than 0.4 dB at 5 GHz and 0.8 dB at 40 GHz when switch is on and the isolation ranges from 38 dB at 2 GHz to 15 dB at 40 GHz when the switch is off. The results agree well with simulation by Zeland IE3D. Cantilever beam is used as the mechanical structure and CPW line works as the transmission line. The cantilever is made of SiO2 and Al is used as the sacrificial layer.

name of conference

• 30th European Microwave Conference, 2000

authors

• Katehi, Linda

published proceedings

• 30th European Microwave Conference, 2000

author list (cited authors)

• Cai, Y., & Katehi, L.

citation count

• 5

complete list of authors

• Cai, Yongming||Katehi, Linda PB

publication date

• October 2000

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• Contacts
• Coplanar Waveguides
• Electrodes
• Gold
• Insertion Loss
• Radio Frequency
• Structural Beams
• Switches
• Telecommunication Switching
• Wideband

Digital Object Identifier (DOI)

• 10.1109/euma.2000.338637

start page

• 1

end page

• 3

URL

• http://dx.doi.org/10.1109/euma.2000.338637