Micromachined filters on synthesized substrates Academic Article

abstract

• Effective high-frequency spectrum usage requires high-performance filters to have a sharp cutoff frequency and high stopband attenuation. Stepped-impedance low-pass designs achieve this function best with large ratios of high-to-low-impedance values. In high-index materials, such as Si (11.7) and GaAs (12.9), however these high-to-low-impedance ratios are around five, thereby significantly limiting optimum filter performance. This paper characterizes the use of Si micromachining for the development of synthesized substrates, which, when utilized appropriately, can further reduce the low-impedance value or increase the high-impedance value. Both designs have demonstrated high-to-low-impedance ratios that are 1.5-2 times larger than conventional techniques.

authors

• Katehi, Linda

published proceedings

• IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

author list (cited authors)

• Drayton, R. F., Pacheco, S. P., Wang, J. N., Yook, J. G., & Katehi, L.

citation count

• 9

complete list of authors

• Drayton, RF||Pacheco, SP||Wang, JN||Yook, JG||Katehi, LPB

publication date

• February 2001

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Microwave Theory and Techniques  Journal

keywords

• Filters
• Micromachining
• Synthesized Substrates

Digital Object Identifier (DOI)

• 10.1109/22.903090

start page

• 308

end page

• 314

volume

• 49

issue

• 2

URL

• http://dx.doi.org/10.1109/22.903090