A Hybrid-Statistical Approach for Accurate Characterization of MEMS on Complex Platforms
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abstract
Micro-electromechanical systems (MEMS) are used in a diverse group of fields. In this paper, we are concerned with the communication and sensing applications, particularly in connection with the Reconfigurable Aperture Antenna (RECAP) project. We present a finite element method (FEM)-based approach to characterizing MEMS devices in the presence of radiators. We concentrate on modeling the MEMS switches since this problem has its own challenges. By modeling, we mean extracting a lumped element model consisting of resistors, inductors and capacitors.
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IEEE Antennas and Propagation Society International Symposium. 2001 Digest. Held in conjunction with: USNC/URSI National Radio Science Meeting (Cat. No.01CH37229)
IEEE Antennas and Propagation Society International Symposium. 2001 Digest. Held in conjunction with: USNC/URSI National Radio Science Meeting (Cat. No.01CH37229)
author list (cited authors)
Ozdemir, T., Sabet, K. F., Yasan, E., Vega, M. C., Ebel, J. L., Creech, G. L., ... Sarabandi, K.
citation count
2
complete list of authors
Ozdemir, T||Sabet, KF||Yasan, E||Vega, MC||Ebel, JL||Creech, GL||Lesniak, CD||Katehi, LPB||Sarabandi, K