In circuit-combining networks, low-loss interconnecting transmission lines are pivotal in reducing excess loss. Micromachined finite ground coplanar waveguides are used in this study as low-loss interconnects showing significant improvements in line loss while maintaining 50-/spl Omega/ characteristic impedance. Wilkinson power dividers, reactive tee junctions, and right-angle bends are combined with micromachined interconnects in 1:2, 1:4, and 1:8 power-dividing networks and show measured loss reduction of 0.3-1.0 dB depending on circuit type and size from 85 to 95 GHz.