MEMS and Si micromachined circuits for high-frequency applications Academic Article uri icon

abstract

  • RF micromachining and microelectromechanical structure (MEMS) technology promise to provide an innovative approach in the development of effective and low-cost circuits and systems. This technology is expected to have significant application in the development of low-cost antenna arrays and reconfigurable apertures, due to its potential to support novel systems architectures. This paper presents a brief history and the state-of-the-art in the development of RF MEMS devices, with primary emphasis on switches and Si-micromachined circuit components for use in high-performance high-density on-wafer packaged circuits.

published proceedings

  • IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

altmetric score

  • 6

author list (cited authors)

  • Katehi, L., Harvey, J. F., & Brown, E.

citation count

  • 80

complete list of authors

  • Katehi, LPB||Harvey, JF||Brown, E

publication date

  • March 2002