Series switch compatible with CMOS technology Conference Paper

abstract

• Series MEMS switches with metal-to-metal contact have been fabricated to operate from DC to 40 GHz. Parylene is used as the structure material and polyamide as the sacrificial layer The mechanical structure is of bridge type. The measured insertion loss is less than 0.5 dB from DC to 40 GHz, when switch is on. The isolation ranges from 40 dB at 2 GHz to 15 dB at 40 GHz, when the switch is off. A new way of planarizing the circuit surface was presented.

name of conference

• 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278)

authors

• Katehi, Linda

published proceedings

• 2002 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

author list (cited authors)

• Cai, Y. M., & Katehi, L.

citation count

• 4

complete list of authors

• Cai, YM||Katehi, LPB

publication date

• January 2002

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 34 Chemical Sciences
• 3402 Inorganic Chemistry
• 40 Engineering

Digital Object Identifier (DOI)

• 10.1109/MWSYM.2002.1011878

International Standard Book Number (ISBN) 10

• 0-7803-7239-5

start page

• 1221

end page

• 1224

volume

• 2

URL

• http://dx.doi.org/10.1109/mwsym.2002.1011878