A micromachined finite coplanar line-to-silicon micromachined waveguide transition for millimeter and submillimeter wave applications Conference Paper

abstract

• A finite ground coplanar (FGC) line-to-waveguide transition utilizing a novel, free-standing printed E-plane probe has been demonstrated in W-band (75-110 GHz). One way to improve the performance of such a transition and to extend its utility well into the submillimeter range is to thin the supporting substrate beneath the probe. This paper presents the W-band performance of a fully micromachined finite ground coplanar line-to-silicon diamond waveguide transition with the substrate beneath the probe entirely removed, thus forming a free-standing metal structure.

name of conference

• 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278)

authors

• Katehi, Linda

published proceedings

• 2002 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

author list (cited authors)

• Lee, Y., Becker, J. P., East, J. R., & Katehi, L.

citation count

• 3

complete list of authors

• Lee, Y||Becker, JP||East, JR||Katehi, LPB

publication date

• January 2002

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 75 To 110 Ghz
• Coplanar Waveguides
• Electromagnetic Waveguides
• Finite Ground Coplanar Line-to-waveguide Transition
• Free-standing Metal Structure
• Free-standing Printed E-plane Probe
• Frequency
• Insertion Loss
• Micromachined Finite Coplanar Line-to-silicon Micromachined Waveguide Transition
• Micromachining
• Millimeter Wave Applications
• Permittivity
• Probes
• Rectangular Waveguides
• Si
• Silicon
• Silicon Micromachined Diamond Waveguide
• Submillimeter Range
• Supporting Substrate Thinning
• Transmission Line Theory
• W-band Performance
• Waveguide Transitions

Digital Object Identifier (DOI)

• 10.1109/mwsym.2002.1012228

International Standard Book Number (ISBN) 10

• 0-7803-7239-5

start page

• 1871

end page

• 1874

volume

• 3

URL

• http://dx.doi.org/10.1109/mwsym.2002.1012228