A Micromachined Finite Coplanar Line-to-Silicon Micromachined Waveguide Transition for Millimeter and Submillimeter Wave Applications Conference Paper uri icon

abstract

  • A finite ground coplanar (FGC) line-to-waveguide transition utilizing a novel, free-standing printed E-plane probe has been demonstrated in W-band (75-110 GHz). One way to improve the performance of such a transition and to extend its utility well into the submillimeter range is to thin the supporting substrate beneath the probe. This paper presents the W-band performance of a fully micromachined finite ground coplanar line-to-silicon diamond waveguide transition with the substrate beneath the probe entirely removed, thus forming a free-standing metal structure.

author list (cited authors)

  • Lee, Y., Becker, J. P., East, J. R., & Katehi, L.

citation count

  • 3

publication date

  • January 2002

publisher