A Vertically Integrated Micromachined Filter
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A 10-GHz filter constructed of slot-coupled micromachined cavities in silicon is presented. The novel character of the filter lies in its structure, which consists of a microstrip feed to cavities via slot apertures and three vertically stacked slot-coupled cavities. The cavities are essentially reduced-height waveguide resonators. The measured results are presented and compared to a finite-element-method model. The simulated model has a bandwidth of 4% with an insertion loss of 0.9 dB at 10.02 GHz. The measured filter yields a 3.7% bandwidth with a deembedded insertion loss of 2.0 dB at 10.01 GHz. Various loss mechanisms are examined to explain the difference between simulated and measured insertion loss.
IEEE Transactions on Microwave Theory and Techniques
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