A millimeter-wave micromachined lowpass filter using lumped elements
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abstract
A new approach is presented for realizing millimeter-wave micromachined lowpass filters using lumped elements. An efficient quasistatic analysis is utilized to design a Ka-band filter with 0.5 dB insertion loss and a rejection bandwidth from 30-125 GHz. The layout requires ten times less area than a comparable stepped-impedance implementation.
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1996 IEEE MTT-S International Microwave Symposium Digest