New results using membrane-supported circuits: a Ka-band power amplifier and survivability testing
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This paper describes recent results which pertain to the integration and reliability testing of micromachined, membrane-supported transmission line circuits. These circuits employ a 1.4-/spl mu/m-thick dielectric membrane to support thin-film conducting lines above an air substrate. With regard to integration, the development of a Ka-band solid state power amplifier (SSPA) is presented. The design includes a membrane-supported Wilkinson power divider/combiner with 0.2 dB loss, along with a commercially available monolithic microwave/millimeter wave integrated circuit (MMIC) amplifier stage. Also reported are tests which investigated the survivability of membrane lines under space qualification conditions. No failures occurred as a result of thermal cycling and vibration testing at levels which reached 39.6 grms.
IEEE Transactions on Microwave Theory and Techniques
author list (cited authors)
Weller, T. M., Katehi, L., Herman, M. I., Wamhof, P. D., Lee, K., Kolawa, E. A., & Tai, B. H.
complete list of authors
Weller, TM||Katehi, LPB||Herman, MI||Wamhof, PD||Lee, K||Kolawa, EA||Tai, BH