A micromachined high-Q X-band resonator Academic Article

abstract

• The authors present a new structure which can be used as a microwave high-Q resonator for the development of narrow-band low-loss filters in a planar environment. The resonator is made of a low-loss micromachined cavity which is easy to integrate with monolithic circuits. Compared to conventional metallic resonators, the performance of this resonator is similar, but the weight and size are significantly reduced.

authors

• Katehi, Linda

published proceedings

• IEEE MICROWAVE AND GUIDED WAVE LETTERS

altmetric score

• 9

author list (cited authors)

• Papapolymerou, J., Cheng, J. C., East, J., & Katehi, L.

citation count

• 105

complete list of authors

• Papapolymerou, J||Cheng, JC||East, J||Katehi, LPB

publication date

• June 1997

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Microwave and Wireless Components Letters  Journal

keywords

• Band Pass Filters
• Band-pass Filters
• Cavity Resonators
• Circuits
• Dielectrics
• High-q Resonator
• Low-loss Micromachined Cavity
• Micromachined Resonator
• Micromachining
• Microstrip
• Microwave Devices
• Microwave Filters
• Moment Methods
• Monolithic Circuits
• Narrowband Low-loss Filters
• Passive Filters
• Planar Environment
• Q Factor
• Q-factor
• Resonator Filters
• Shf
• Silicon
• Size Reduction
• Transmission Line Matrix Methods
• Weight Reduction
• X-band Resonator

Digital Object Identifier (DOI)

• 10.1109/75.585207

start page

• 168

end page

• 170

volume

• 7

issue

• 6

URL

• http://dx.doi.org/10.1109/75.585207