W-band micromachined Finite Ground Coplanar (FGC) line circuit elements Conference Paper

abstract

• This paper describes the development and characterization of Si-micromachined Finite Ground Coplanar (FGC) circuit components between 2 and 110 GHz. FGC lines are micromachined to eliminate the dielectric in the aperture regions, where the electromagnetic fields concentrate, in an effort to further improve their propagation characteristics and to provide loss levels only demonstrated by membrane lines. Measured results have shown a loss improvement of 1 dB/cm at 94 GHz. A micromachined FGC bandpass filter has shown a .8 dB improvement in insertion loss at 94 GHz over a conventional FGC line. Therefore, this approach offers an excellent alternative to the membrane technology, exhibiting very low loss, no dispersion, and mode free operation without using membranes to support the metallic structures.

name of conference

• 1997 IEEE MTT-S International Microwave Symposium Digest

authors

• Katehi, Linda

published proceedings

• 1997 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS I-III

author list (cited authors)

• Herrick, K. J., Schwarz, T., & Katehi, L.

citation count

• 14

complete list of authors

• Herrick, KJ||Schwarz, T||Katehi, LPB

publication date

• January 1997

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 2 To 110 Ghz
• Apertures
• Band-pass Filters
• Bandpass Filter
• Biomembranes
• Circuits
• Coplanar Waveguides
• Dielectric Loss Measurement
• Dielectric Losses
• Dielectric Measurements
• Electromagnetic Fields
• Electromagnetic Propagation
• Fgc Circuit Components
• Finite Ground Coplanar Line
• Insertion Loss
• Loss Levels
• Loss Measurement
• Metallic Structures
• Micromachined Lines
• Micromachining
• Millimetre Wave Filters
• Mimic
• Mode Free Operation
• Propagation Characteristics
• Propagation Losses
• W-band

Digital Object Identifier (DOI)

• 10.1109/mwsym.1997.604571

International Standard Book Number (ISBN) 10

• 0-7803-3814-6

start page

• 269

end page

• 272

volume

• 1

URL

• http://dx.doi.org/10.1109/mwsym.1997.604571