The effects of line width and slot etching on silicon-based CPW at MM-wave frequencies Conference Paper uri icon

abstract

  • An experimental study is in progress to investigate the performance of coplanar waveguide (CPW) transmission lines which are printed on high-resistivity silicon. In one sample group a nominal characteristic impedance of 50 is maintained while the ground plane spacing and ground plane width are varied. In this group conventional CPW lines are included, as well as lines in which the slots have been etched to create a triangular-shaped recess between the center conductor and ground planes. The slot-etching technique is known to be an effective method to decrease attenuation, and is demonstrated here with measurements up to 67 GHz. In another group of samples identical lines with and without etching are characterized to determine the difference in attenuation and characteristic impedance. All lines used in this work are classified as finite ground CPW (FGC), as the ground plane width is comparable to the slot and center conductor dimensions.

name of conference

  • 50th ARFTG Conference Digest

published proceedings

  • 50TH ARFTG CONFERENCE DIGEST

author list (cited authors)

  • Weller, T., Imparato, M., Dunleavy, L., Henderson, R., Robertson, S., & Katehi, L.

citation count

  • 0

complete list of authors

  • Weller, T||Imparato, M||Dunleavy, L||Henderson, R||Robertson, S||Katehi, L

publication date

  • December 1997