Micromachined devices for wireless communications Academic Article

abstract

• An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and millimeter-wave filters, low-loss micromechanical switches, microscale vibrating mechanical resonators with Q's in the tens of thousands, and miniature antennas for millimeter-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers.

authors

• Katehi, Linda

published proceedings

• PROCEEDINGS OF THE IEEE

altmetric score

• 6

author list (cited authors)

• Nguyen, C., Katehi, L., & Rebeiz, G. M.

citation count

• 336

complete list of authors

• Nguyen, CTC||Katehi, LPB||Rebeiz, GM

publication date

• January 1998

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• Proceedings of the Institute of Electrical and Electronics Engineers (IEEE)  Journal

keywords

• Acoustic Resonators
• Antennas
• Filters
• High-q
• If
• MEMS
• Micromachining
• Oscillators
• Phase Noise
• Resonators
• Rf
• Switchers
• Synthesizers
• Thin-film Inductors
• Transceivers
• Tunable
• Wireless

Digital Object Identifier (DOI)

• 10.1109/5.704281

start page

• 1756

end page

• 1768

volume

• 86

issue

• 8