Micromechanical electrostatic K-band switches Conference Paper uri icon

abstract

  • Two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported. Both designs also incorporate an electrode situated above the switching structure in order to provide system stability. DC measurements indicate pull-in voltages of 14 and 16 V, with RF isolation of better than -30 dB up to 40 GHz.

name of conference

  • 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192)

published proceedings

  • 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192)

altmetric score

  • 3

author list (cited authors)

  • Pacheco, S., Nguyen, C. T., & Katehi, L.

citation count

  • 85

complete list of authors

  • Pacheco, S||Nguyen, CT||Katehi, LPB

publication date

  • January 1998

publisher