Micromechanical electrostatic K-band switches Conference Paper

abstract

• Two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported. Both designs also incorporate an electrode situated above the switching structure in order to provide system stability. DC measurements indicate pull-in voltages of 14 and 16 V, with RF isolation of better than -30 dB up to 40 GHz.

name of conference

• 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192)

authors

• Katehi, Linda

published proceedings

• IEEE MTT-S International Microwave Symposium digest

altmetric score

• 3

author list (cited authors)

• Pacheco, S., Nguyen, C. T., & Katehi, L.

citation count

• 90

complete list of authors

• Pacheco, S||Nguyen, CT||Katehi, LPB

publication date

• January 1998

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 40 Engineering
• 4009 Electronics, Sensors And Digital Hardware

Digital Object Identifier (DOI)

• 10.1109/mwsym.1998.700675

start page

• 1569-1572 vol.3

end page

• 1572 vol.3

volume

• 3

URL

• http://dx.doi.org/10.1109/mwsym.1998.700675