Micromechanical electrostatic K-band switches Conference Paper uri icon


  • Two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported. Both designs also incorporate an electrode situated above the switching structure in order to provide system stability. DC measurements indicate pull-in voltages of 14 and 16 V, with RF isolation of better than -30 dB up to 40 GHz.

altmetric score

  • 3

author list (cited authors)

  • Pacheco, S., Nguyen, C. T., & Katehi, L.

citation count

  • 85

publication date

  • January 1998