Suppression of surface waves using the micromachining technique Conference Paper

abstract

• Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.

name of conference

• IEEE Antennas and Propagation Society International Symposium. 1998 Digest. Antennas: Gateways to the Global Network. Held in conjunction with: USNC/URSI National Radio Science Meeting (Cat. No.98CH36194)

authors

• Katehi, Linda

published proceedings

• IEEE ANTENNAS AND PROPAGATION SOCIETY INTERNATIONAL SYMPOSIUM - ANTENNAS: GATEWAYS TO THE GLOBAL NETWORK, VOLS 1-4

author list (cited authors)

• Yook, J. G., & Katehi, L.

citation count

• 2

complete list of authors

• Yook, JG||Katehi, LPB

publication date

• January 1998

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• 3d Finite Element Method
• Antenna Feeds
• Antenna Theory
• Bandwidth
• Dielectric Constant
• Dielectric Materials
• Dielectric Substrates
• Effective Dielectric Constant Curves
• Elemental Semiconductors
• Finite Element Analysis
• Higher Order Modes
• Micromachining
• Micromachining Technique
• Microstrip Antennas
• Microwave Antennas
• Millimeter Wave Technology
• Millimeter-wave Antennas
• Millimetre Wave Antennas
• Patch Antennas
• Patch Antennas Design
• Permittivity
• Si
• Silicon
• Silicon Micromachining
• Silicon Substrate Material
• Substrate Modes Suppression
• Surface Waves
• Surface Waves Suppression

Digital Object Identifier (DOI)

• 10.1109/aps.1998.702022

International Standard Book Number (ISBN) 10

• 0-7803-4478-2

start page

• 652

end page

• 655

volume

• 2

URL

• http://dx.doi.org/10.1109/aps.1998.702022