A 10-60-GHz micromachined directional coupler Academic Article

abstract

• A 20-dB directional coupler has been designed and fabricated on a thin dielectric membrane using micromachining techniques. The fabrication process is compatible with monolithic microwave integrated-circuit (MMIC) techniques, and the coupler can be integrated into a planar-circuit layout. Design of the asymmetric tapered coupled-line coupler relies on simple quasi-static models and ideal transmission-line theory. The use of membrane technology results in less than 0.5-dB insertion loss in the coupler from 10 to 60 GHz. In addition, a micromachined packaging technique creates a shielded circuit, which is extremely compact and lightweight.

authors

• Katehi, Linda

published proceedings

• IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

author list (cited authors)

• Robertson, S. V., Brown, A. R., Katehi, L., & Rebeiz, G. M.

citation count

• 19

complete list of authors

• Robertson, SV||Brown, AR||Katehi, LPB||Rebeiz, GM

publication date

• January 1998

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Microwave Theory and Techniques  Journal

keywords

• Directional Coupler
• Integrated Circuits
• Membrane
• Micromachined
• Millimeter Wave

Digital Object Identifier (DOI)

• 10.1109/22.734498

start page

• 1845

end page

• 1849

volume

• 46

issue

• 11