The effects of slot positioning on the bandwidth of a micromachined resonator
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This paper presents the effect of slot positions on the bandwidth and the response of a micromachined high-Q X-Band resonator formed by a micromachined cavity. Theory and experiment indicate that a narrow-band, low-loss response can be achieved by changing the placement of the slots relative to the center of the cavity. As a result, narrow-band, low-loss, monolithic filters with small weight and planar characteristics can be designed.