Micromachined circuits for millimeter- and sub-millimeter-wave applications Academic Article

abstract

• Two approaches for the development of micromachined circuits for millimeter- and submillimeter-wave applications are discussed. These technologies provide a means to overcome the drawbacks typically associated with conventional planar transmission lines, such as microstrip and coplanar waveguides. Examples demonstrating the use of micromachining to effectively incorporate a third dimension into the geometry of monolithic circuits are presented. This introduces additional parameters in the design and results in structures with superior electrical performance, such as membrane-supported circuits, and reduced volume and weight, such as micromachined-shielded circuits. Micromachined circuits which incorporate miniaturized shielding packages in a monolithic design are described. The performance of these circuits shows that the low-volume, low-weight packaging is effective in reducing signal loss, without degrading the desired frequency response.<>

authors

• Katehi, Linda

published proceedings

• IEEE Antennas and Propagation Magazine

altmetric score

• 9

author list (cited authors)

• Katehi, L., Rebeiz, G. M., Weller, T. M., Drayton, R. F., Cheng, H. J., & Whitaker, J. F.

citation count

• 48

complete list of authors

• Katehi, LPB||Rebeiz, GM||Weller, TM||Drayton, RF||Cheng, HJ||Whitaker, JF

publication date

• October 1993

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Antennas and Propagation Magazine  Journal

keywords

• Coplanar Waveguides
• Design
• Electrical Performance
• Frequency Response
• Integrated Circuit Technology
• Low-pass Filters
• Membrane-supported Circuits
• Micromachined Circuits
• Micromachined-shielded Circuits
• Micromachining
• Microstrip
• Microstrip Lines
• Microwave Antennas
• Microwave Filters
• Millimeter Wave Technology
• Mm-wave Application
• Mmic
• Monolithic Circuits
• Network Synthesis
• Packaging
• Planar Transmission Lines
• Planar Waveguides
• Shielding
• Si
• Signal Loss
• Submillimeter Wave Circuits
• Submillimeter Wave Propagation
• Submillimeter Wave Technology
• Submillimetre Wave Devices
• Submm-wave Application
• Surface Treatment
• Transmission Lines

Digital Object Identifier (DOI)

• 10.1109/74.242171

start page

• 9

end page

• 17

volume

• 35

issue

• 5

URL

• http://dx.doi.org/10.1109/74.242171