Development of miniature microwave circuit components using micromachining techniques Conference Paper uri icon


  • Miniature microwave circuit components are presented that were developed using silicon micromachining techniques. Although micromachining is very well known in sensor applications, it is used, herein, for the first time in microwave applications. This paper presents the development of micromachined lines and describes the theoretical and experimental characterization of circuit components such as filters and tuning stubs.<>

author list (cited authors)

  • Drayton, R. F., & Katehi, L.

citation count

  • 12

publication date

  • January 1994