DEVELOPMENT OF MINIATURE MICROWAVE CIRCUIT COMPONENTS USING MICROMACHINING TECHNIQUES Conference Paper

abstract

• Miniature microwave circuit components are presented that were developed using silicon micromachining techniques. Although micromachining is very well known in sensor applications, it is used, herein, for the first time in microwave applications. This paper presents the development of micromachined lines and describes the theoretical and experimental characterization of circuit components such as filters and tuning stubs.<>

name of conference

• 1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No.94CH3389-4)

authors

• Katehi, Linda

published proceedings

• 1994 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

author list (cited authors)

• DRAYTON, R. F., & KATEHI, L.

citation count

• 14

complete list of authors

• DRAYTON, RF||KATEHI, LPB

publication date

• January 1994

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 40 Engineering
• 4009 Electronics, Sensors And Digital Hardware

Digital Object Identifier (DOI)

• 10.1109/MWSYM.1994.335331

International Standard Book Number (ISBN) 10

• 0-7803-1778-5

start page

• 225

end page

• 228

URL

• http://dx.doi.org/10.1109/mwsym.1994.335331