MICROMACHINED CONFORMAL PACKAGES FOR MICROWAVE AND MILLIMETER-WAVE APPLICATIONS Conference Paper

abstract

• High frequency circuit performance is significantly influenced by its RF package configuration. This paper presents the use of Si micromachining to develop a miniature package that conforms to the circuit geometry while providing physical and electromagnetic shielding. The advantages of a conformal package, other than reduced size, are control of package resonances, the capability to isolate individual circuit elements and improve circuit performance through elimination of parasitic radiation. In addition, the use of micromachining provides reduced fabrication tolerances and most importantly lower cost.<>

name of conference

• Proceedings of 1995 IEEE MTT-S International Microwave Symposium

authors

• Katehi, Linda

published proceedings

• 1995 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

author list (cited authors)

• DRAYTON, R. F., & KATEHI, L.

citation count

• 3

complete list of authors

• DRAYTON, RF||KATEHI, LPB

publication date

• January 1995

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• Circuit Elements
• Circuit Geometry
• Circuit Optimization
• Cost
• Electromagnetic Shielding
• Fabrication Tolerances
• Geometry
• High Frequency Circuit Performance
• Integrated Circuit Packaging
• Micromachined Conformal Packages
• Micromachining
• Microwave Applications
• Millimeter Wave Circuits
• Millimeter-wave Applications
• Mimic
• Mmic
• Package Resonances
• Packaging
• Parasitic Radiation
• Physical Shielding
• Radio Frequency
• Resonance
• Rf Package Configuration
• Rlc Circuits
• Si
• Size Control

Digital Object Identifier (DOI)

• 10.1109/mwsym.1995.406230

International Standard Book Number (ISBN) 10

• 0-7803-2582-6

start page

• 1387

end page

• 1390

URL

• http://dx.doi.org/10.1109/mwsym.1995.406230