Fabrication issues in constructing freestanding membranes of near-frictionless carbon and diamond-like films
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DIAMOND AND RELATED MATERIALS
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Zhou, B., Prorok, B. C., Erdemir, A., & Eryilmaz, O.
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Zhou, B||Prorok, BC||Erdemir, A||Eryilmaz, O
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Dlc
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Membrane
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Micromachining
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Near-frictionless Carbon
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http://dx.doi.org/10.1016/j.diamond.2006.06.021