Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices Academic Article uri icon

published proceedings

  • DIAMOND AND RELATED MATERIALS

altmetric score

  • 6

author list (cited authors)

  • Krauss, A. R., Auciello, O., Gruen, D. M., Jayatissa, A., Sumant, A., Tucek, J., ... Ding, M. Q.

citation count

  • 336

complete list of authors

  • Krauss, AR||Auciello, O||Gruen, DM||Jayatissa, A||Sumant, A||Tucek, J||Mancini, DC||Moldovan, N||Erdemir, A||Ersoy, D||Gardos, MN||Busmann, HG||Meyer, EM||Ding, MQ

publication date

  • November 2001