Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
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DIAMOND AND RELATED MATERIALS
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Krauss, A. R., Auciello, O., Gruen, D. M., Jayatissa, A., Sumant, A., Tucek, J., ... Ding, M. Q.
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Krauss, AR||Auciello, O||Gruen, DM||Jayatissa, A||Sumant, A||Tucek, J||Mancini, DC||Moldovan, N||Erdemir, A||Ersoy, D||Gardos, MN||Busmann, HG||Meyer, EM||Ding, MQ
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Assembly Devices
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Diamond Thin Films
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Ultrananocrystalline
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http://dx.doi.org/10.1016/s0925-9635(01)00385-5