HIGH-ENERGY (MEV) ION-BEAM MODIFICATIONS OF SPUTTERED MOS2 COATINGS ON SAPPHIRE
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Overview
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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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BHATTACHARYA, R. S., RAI, A. K., & ERDEMIR, A.
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BHATTACHARYA, RS||RAI, AK||ERDEMIR, A
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51 Physical Sciences
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5104 Condensed Matter Physics
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5106 Nuclear And Plasma Physics
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http://dx.doi.org/10.1016/0168-583x(91)95705-i