Copper film deposition using a helium dielectric barrier discharge jet Academic Article uri icon

published proceedings

  • PLASMA PROCESSES AND POLYMERS

author list (cited authors)

  • Tsai, T., Mcintyre, K., Burnette, M., & Staack, D.

citation count

  • 3

complete list of authors

  • Tsai, Tsungā€Chan||Mcintyre, Katelyn||Burnette, Matthew||Staack, David

publication date

  • June 2020

publisher