Thin Film Deposition using Atmospheric Pressure Microplasmas Conference Paper

name of conference

• 2007 IEEE 34th International Conference on Plasma Science (ICOPS)

authors

• Staack, David

published proceedings

• 2007 IEEE 34th International Conference on Plasma Science (ICOPS)

author list (cited authors)

• Staack, D., Farouk, B., Gutsol, A., & Fridman, A.

citation count

• 5

complete list of authors

• Staack, D||Farouk, B||Gutsol, A||Fridman, A

publication date

• June 2007

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

Digital Object Identifier (DOI)

• 10.1109/ppps.2007.4346139

start page

• 833

end page

• 833

URL

• http://dx.doi.org/10.1109/ppps.2007.4346139