Challenges in Patterning Mn12‐acetate Thin Films by Electron‐Beam Lithography Conference Paper uri icon

abstract

  • We investigate how electron-beam lithography can be applied to pattern Mn12-acetate thin films produced by a solution evaporation technique. The low temperature magnetic ac-susceptibility data of the powder sample extracted from a film dipped into acetone indicate that some of the molecules in the film are deformed by acetone treatment concluding that acetone is not a proper chemical for the lift-off process, a crucial step in the patterning procedure. © 2006 American Institute of Physics.

author list (cited authors)

  • Kim, K., Ford, A., Meenakshi, V., Teizer, W., Zhao, H., & Dunbar, K. R.

publication date

  • January 1, 2006 11:11 AM

publisher

  • AIP  Publisher