Challenges in patterning Mn-12-acetate thin films by electron-beam lithography Conference Paper uri icon

abstract

  • We investigate how electron-beam lithography can be applied to pattern Mn12-acetate thin films produced by a solution evaporation technique. The low temperature magnetic ac-susceptibility data of the powder sample extracted from a film dipped into acetone indicate that some of the molecules in the film are deformed by acetone treatment concluding that acetone is not a proper chemical for the lift-off process, a crucial step in the patterning procedure. 2006 American Institute of Physics.

name of conference

  • LOW TEMPERATURE PHYSICS: 24th International Conference on Low Temperature Physics - LT24

published proceedings

  • LOW TEMPERATURE PHYSICS, PTS A AND B

author list (cited authors)

  • Kim, K., Ford, A., Meenakshi, V., Teizer, W., Zhao, H., & Dunbar, K. R.

citation count

  • 0

complete list of authors

  • Kim, K||Ford, A||Meenakshi, V||Teizer, W||Zhao, H||Dunbar, KR

publication date

  • September 2006

publisher

  • AIP  Publisher