Increasing the Utilization of Deep Neural Networks for SEM Measurements Through Multiple Task Formulation and Visualization
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IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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Chaudhary, N., & Savari, S. A.
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Chaudhary, Narendra||Savari, Serap A
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Deep Learning
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Image Edge Detection
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Line Edge Roughness
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Neural Networks
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Noise Measurement
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Noise Reduction
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Scanning Electron Microscope
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Scanning Electron Microscopy
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Task Analysis
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Visualization
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http://dx.doi.org/10.1109/tsm.2020.2979680