Femtosecond optical curing of SU-8 photoresist Conference Paper

name of conference

• Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII

authors

• Yakovlev, Vladislav

published proceedings

• ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XIII

altmetric score

• 1.85

author list (cited authors)

• Marble, C. B., Marble, K. S., & Yakovlev, V. V.

citation count

• 1

complete list of authors

• Marble, Christopher B||Marble, Kassie S||Yakovlev, Vladislav V

editor list (cited editors)

• von Freymann, G., Blasco, E., & Chanda, D.

publication date

• February 2020

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Atomic Force Microscopy
• Direct Laser Writing
• Femtosecond Optical Curing
• Lithography
• Optical Lithography
• Polymerization Mechanisms
• Su-8
• Three-dimensional Laser Lithography

Digital Object Identifier (DOI)

• 10.1117/12.2545202

start page

• 112921h-112921h-7

volume

• 11292

URL

• http://dx.doi.org/10.1117/12.2545202