"Marriage" of LbL-nanoassembly and traditional lithography for microelectronic element production. Conference Paper
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Overview
published proceedings
- ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
author list (cited authors)
- Lvov, Y. M., Hua, F., Shi, J. S., Cui, T. H., & McShane, M. J.
complete list of authors
- Lvov, YM||Hua, F||Shi, JS||Cui, TH||McShane, MJ
publication date
- September 2003