Study on the Electromagnetic Radiation Characteristics of Discharging Excimer Laser System Conference Paper

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name of conference

High Power Lasers, High Energy Lasers, and Silicon-based Photonic Integration

authors

Wang, Qingsheng

published proceedings

HIGH POWER LASERS, HIGH ENERGY LASERS, AND SILICON-BASED PHOTONIC INTEGRATION

author list (cited authors)

Zhao, D., Liang, X. u., Fang, X., & Wang, Q.

citation count

0

complete list of authors

Zhao, Duliang||Liang, Xu||Fang, Xiaodong||Wang, Qingsheng

editor list (cited editors)

Wang, L., & Zhou, Z.

publication date

October 2016

publisher

SPIE, the international society for optics and photonics Publisher

published in

Proceedings of SPIE Journal