Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition Academic Article uri icon

author list (cited authors)

  • Wheeler, V. D., Nepal, N., Boris, D. R., Qadri, S. B., Nyakiti, L. O., Lang, A., ... Meyer, D. J.

publication date

  • January 1, 2020 11:11 AM