Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
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Overview
author list (cited authors)
- Wheeler, V. D., Nepal, N., Boris, D. R., Qadri, S. B., Nyakiti, L. O., Lang, A., ... Meyer, D. J.
publication date
- January 1, 2020 11:11 AM
publisher
- American Chemical Society (ACS) Publisher
published in
- CHEMISTRY OF MATERIALS Journal