Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition uri icon

published proceedings

  • CHEMISTRY OF MATERIALS

altmetric score

  • 1.25

author list (cited authors)

  • Wheeler, V. D., Nepal, N., Boris, D. R., Qadri, S. B., Nyakiti, L. O., Lang, A., ... Meyer, D. J.

citation count

  • 34

complete list of authors

  • Wheeler, Virginia D||Nepal, Neeraj||Boris, David R||Qadri, Syed B||Nyakiti, Luke O||Lang, Andrew||Koehler, Andrew||Foster, Geoffrey||Walton, Scott G||Eddy, Charles R Jr||Meyer, David J

publication date

  • February 2020