Hybrid ${ m As}_{2}{ m S}_{3}$ Mach-Zehnder Interferometer Prepared by Magnetron Sputtering and its Photodarkening Effect
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abstract
Several hybrid integrated As 2S 3 Mach-Zehnder interferometers with linear tapers and grating couplers have been successfully fabricated using magnetron sputtering on LiNbO 3 substrate. It demonstrated how As 2S 3 waveguide can be integrated with the LiNbO 3 waveguide to create a hybrid interferometer for use in chalcogenide photonics. The photo-induced changes in the group and effective index of the As 2S 3 waveguide were measured and compared to values reported for films prepared by thermal evaporation. These photo-induced phenomena are found to be different from those reported for As 2 S 3 bulk glass and thermally evaporated As 2S 3 film. 2006 IEEE.
