Hybrid ${
m As}_{2}{
m S}_{3}$ Mach-Zehnder Interferometer Prepared by Magnetron Sputtering and its Photodarkening Effect Academic Article uri icon


  • Several hybrid integrated As 2S 3 Mach-Zehnder interferometers with linear tapers and grating couplers have been successfully fabricated using magnetron sputtering on LiNbO 3 substrate. It demonstrated how As 2S 3 waveguide can be integrated with the LiNbO 3 waveguide to create a hybrid interferometer for use in chalcogenide photonics. The photo-induced changes in the group and effective index of the As 2S 3 waveguide were measured and compared to values reported for films prepared by thermal evaporation. These photo-induced phenomena are found to be different from those reported for As 2 S 3 bulk glass and thermally evaporated As 2S 3 film. 2006 IEEE.

published proceedings

  • IEEE Journal of Quantum Electronics

author list (cited authors)

  • Tan, W. C., Chen, Q. i., Kim, J., & Madsen, C.

citation count

  • 3

complete list of authors

  • Tan, Wee Chong||Chen, Qi||Kim, Jaehyun||Madsen, Christi

publication date

  • February 2012