Rapid Characterization of Threshold Voltage Fluctuation in MOS Devices
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We present a technique for fast characterization of random threshold voltage variation in MOS devices. Our VT scatter characterization method measures threshold voltage shift by monitoring the change in gate-to-source voltage VGS for a fixed drain current IDS and drain-to-source voltage VDs. We measure VGs variation for a large set of devices arranged in an individually addressable array and report results of VT scatter measurement from a test chip in a 65 nm SOI CMOS process. We also measure and report the magnitude of local device current mismatch caused by the VT fluctuation. 2007 IEEE.
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2007 IEEE International Conference on Microelectronic Test Structures