Growth of 4H- and 3C-SiC Epitaxial Layers on 4H-SiC Step-Free Mesas Conference Paper uri icon


  • Homo- and heteroepitaxial 3C-SiC layers were grown on 4H-SiC step-free mesas. The yields of smooth, defect-free mesas were ~ 17% for both intentionally and unintentionally doped films, while those with screw dislocations and multiple stepped surfaces were ~ 22%. The electronic and structural properties of the mesas were found on a micrometer-sized length scale using -PL and -Raman, respectively. 3C-SiC mesas were found to have complete 3C-SiC coverage with some of the mesas having electronic defects, while other mesas were found to be defect-free.

published proceedings

  • Materials Science Forum

author list (cited authors)

  • Myers-Ward, R. L., Nyakiti, L. O., Hite, J. K., Glembocki, O. J., Bezares, F. J., Caldwell, J. D., ... Gaskill, D. K.

publication date

  • January 1, 2011 11:11 AM