2012 Springer Science+Business Media, LLC. All rights reserved. This chapter starts off with a discussion on the history of graphite growth on SiC. It then gives an overview of various methods to grow epitaxial graphene on SiC; methods discussed include growth on various polytypes, at different vacuum levels and gas flows, and on both the Si- and C-face of SiC. Structural and electronic properties of these films are looked into along with carrier mobility results from Hall-bar and FET-structures where available.
