Plasma-based chemical modification of epitaxial graphene with oxygen functionalities Conference Paper uri icon


  • Epitaxial graphene is promising material for future graphene-based applications including high frequency devices and chemical/biological sensors. Modifying the surface chemistry of graphene allows one to control its properties and thus provides a promising route towards further broadening the device application space for this unique material. Herein, we demonstrate the use of electron beam generated plasmas as a route towards controlled oxygen doping of epitaxial graphene. X-ray photoelectron spectroscopy, Raman spectroscopy and electrical measurements are used to track the oxygen incorporation and its influence on the structural and electrical properties of epitaxial graphene. 2013 Elsevier B.V.

published proceedings


author list (cited authors)

  • Hernandez, S. C., Wheeler, V. D., Osofsky, M. S., Jernigan, G. G., Nagareddy, V. k., Nath, A., ... Walton, S. G.

citation count

  • 20

complete list of authors

  • Hernandez, SC||Wheeler, VD||Osofsky, MS||Jernigan, GG||Nagareddy, Vk||Nath, A||Lock, EH||Nyakiti, LO||Myers-Ward, RL||Sridhara, K||Horsfall, AB||Eddy, CR Jr||Gaskill, DK||Walton, SG

publication date

  • January 2014