Plasma-based chemical modification of epitaxial graphene with oxygen functionalities Conference Paper uri icon


  • Epitaxial graphene is promising material for future graphene-based applications including high frequency devices and chemical/biological sensors. Modifying the surface chemistry of graphene allows one to control its properties and thus provides a promising route towards further broadening the device application space for this unique material. Herein, we demonstrate the use of electron beam generated plasmas as a route towards controlled oxygen doping of epitaxial graphene. X-ray photoelectron spectroscopy, Raman spectroscopy and electrical measurements are used to track the oxygen incorporation and its influence on the structural and electrical properties of epitaxial graphene. ¬© 2013 Elsevier B.V.

author list (cited authors)

  • Hern√°ndez, S. C., Wheeler, V. D., Osofsky, M. S., Jernigan, G. G., Nagareddy, V. K., Nath, A., ... Walton, S. G.

citation count

  • 17

publication date

  • February 2014