Systems and methods for in-situ formation of nanoparticles and nanofins Patent uri icon


  • Systems and methods for forming nanoparticles in-situ are disclosed herein. The nanoparticles may be formed in-situ through thermocycling a solution comprising at least one of a molten salt, a surfactant, and a catalyst. The nanoparticles may form in the solution itself and/or on surfaces of a vessel in which the solution is formed. Nanofins may be formed from the agglomeration of particles in the solution and on surfaces. Microchannels may be formed by these nanofins, and in some cases microchannels on a surface may have nanofins form on the surface. In some embodiments, a previously formed solution that has nanoparticles formed in-situ may be used to generate nanofins in a vessel, on a wafer in a vessel, in the solution itself, or combinations thereof.

author list (cited authors)

  • Banerjee, D., Jo, B., Yu, J., Jung, S., Shin, D., Jeon, S., & Kang, S.

publication date

  • March 2019