Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors Conference Paper uri icon


  • 2019 SPIE. This paper reports a new micromachined two-axis water-immersible micro scanning mirror using BoPET (biaxiallyoriented polyethylene terephthalate) hinges. A new fabrication process based on lithography, wafer-bonding, and reactive ion etching on a hybrid silicon-polymer substrate was developed to enable high-resolution patterning, miniaturization and also batch fabrication capability. For demonstration, a prototype scanning mirror was designed, fabricated and tested. Its overall size was reduced to 555 mm3, which is comparable to that of a typical siliconbased micro scanning mirror. The testing results show good raster scanning performance. This approach could enable the miniaturization and batch fabrication of water-immersible scanning mirrors for different scanning optical and acoustic imaging applications in liquid environments.

name of conference

  • MOEMS and Miniaturized Systems XVIII

published proceedings


altmetric score

  • 0.5

author list (cited authors)

  • Xu, S., Li, S., & Zou, J.

citation count

  • 0

complete list of authors

  • Xu, Song||Li, Shuangliang||Zou, Jun

editor list (cited editors)

  • Piyawattanametha, W., Park, Y., & Zappe, H.

publication date

  • March 2019