Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors
Conference Paper
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Overview
abstract
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© 2019 SPIE. This paper reports a new micromachined two-axis water-immersible micro scanning mirror using BoPET (biaxiallyoriented polyethylene terephthalate) hinges. A new fabrication process based on lithography, wafer-bonding, and reactive ion etching on a hybrid silicon-polymer substrate was developed to enable high-resolution patterning, miniaturization and also batch fabrication capability. For demonstration, a prototype scanning mirror was designed, fabricated and tested. Its overall size was reduced to 5×5×5 mm3, which is comparable to that of a typical siliconbased micro scanning mirror. The testing results show good raster scanning performance. This approach could enable the miniaturization and batch fabrication of water-immersible scanning mirrors for different scanning optical and acoustic imaging applications in liquid environments.
name of conference
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MOEMS and Miniaturized Systems XVIII
published proceedings
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MOEMS and Miniaturized Systems XVIII
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author list (cited authors)
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Xu, S., Li, S., & Zou, J.
citation count
complete list of authors
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Xu, Song||Li, Suangliang||Zou, Jun
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Research
keywords
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Deep Reactive Ion Etching
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Polymer Hinges
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Two-axis Scanning Mirror
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Water-immersible
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 13
Additional Document Info