Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors
Conference Paper
-
- Overview
-
- Research
-
- Identity
-
- Additional Document Info
-
- View All
-
Overview
abstract
-
© 2019 SPIE. This paper reports a new micromachined two-axis water-immersible micro scanning mirror using BoPET (biaxiallyoriented polyethylene terephthalate) hinges. A new fabrication process based on lithography, wafer-bonding, and reactive ion etching on a hybrid silicon-polymer substrate was developed to enable high-resolution patterning, miniaturization and also batch fabrication capability. For demonstration, a prototype scanning mirror was designed, fabricated and tested. Its overall size was reduced to 5×5×5 mm3, which is comparable to that of a typical siliconbased micro scanning mirror. The testing results show good raster scanning performance. This approach could enable the miniaturization and batch fabrication of water-immersible scanning mirrors for different scanning optical and acoustic imaging applications in liquid environments.
author list (cited authors)
-
Xu, S., Li, S., & Zou, J.
publication date
publisher
published in
Research
keywords
-
Deep Reactive Ion Etching
-
Polymer Hinges
-
Two-axis Scanning Mirror
-
Water-immersible
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 13
Additional Document Info
