Fabrication of PMMA Acoustophoretic Microfluidic Chip Using Plasma Assisted Bonding Academic Article uri icon


  • In this paper, we propose a simple and low-cost fabrication method for PMMA (Poly (Methyl Methacrylate)) acoustophoretic microfluidic chips using plasma-assisted bonding followed by MEMS (Microelectromechanical Systems) processes. A metal mold for replicating the PMMA polymer was fabricated using MEMS processes, and the microfluidic channel was imprinted on the PMMA polymer using a hot-embossing process. The closed fabricated microfluidic channel was achieved by means of the plasma-assisted bonding between the PMMA channel and the flat PMMA cover. The plasma treatment and hotembossing conditions for PMMA-PMMA bonding were studied and evaluated. The particle separation test confirmed that the PMMA acoustophoretic microfluidic chips could be used. We expect the Si-based acoustophoretic microfluidic chip to be replaced by the presented polymer chip in such applications as blood or droplet separation.

published proceedings

  • Journal of the Korean Society for Precision Engineering

author list (cited authors)

  • Yoon, R. R., Kim, S. M., Han, A., & Cho, Y. H.

citation count

  • 3

complete list of authors

  • Yoon, Ryu Ri||Kim, Sung Man||Han, Arum||Cho, Young Hak

publication date

  • May 2017