A Two-Axis Water-Immersible Micro Scanning Mirror Driven by Single Inductor Coil through Dynamic Structural Filtering
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2018 In this paper, we report a new electromagnetic two-axis water-immersible scanning mirrors driven by a single inductor coil and its application in 3D scanning ultrasound microscopic imaging. The intrinsic dynamic structural filtering due to significantly different resonance frequencies of the two scanning axes was used to suppress their mechanical coupling and therefore allow independent control of the two scanning motions. For verification, a prototype micro scanning mirror was designed, fabricated and tested. The resonance frequencies of the fast and slow axes in air and water were 720/72 Hz and 690/55 Hz, respectively. The optical tilting angles of both fast and slow axes at the resonance frequencies were characterized, showing good linearity with the amplitude of the driving current. With both axes driven simultaneously, stable and repeatable 2D raster scanning was achieved in both air and water. By tuning the phase differences between the fast- and slow-axis driving currents to shift the raster scanning paths, 2D B-mode and 3D ultrasound microscopic imaging with increased density of image pixels were also demonstrated.
