Sensing and Informatics in Laser-Based Nanomanufacturing Processes
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2014 by Taylor & Francis Group, LLC. As foretold by Professor Taniguchi some 20 years ago [1], lasers have emerged as a primary energy source for material/phase transformation, removal, or addition in manufacturing processes to realize atomic-scale precisions and nanometric scale features, such as films, tubes, wires, honeycomb, as well as various macromolecular structures [2]. Nanomanufacturing is a process of using precision machines that can generate precision tool motions to fabricate designed surface forms/dimensions with nanometric tolerance [3]. Nanomanufacturing has attracted considerable attention recently, due to the requirement of increasingly sophisticated devices and structures with outstanding properties and the trend of decreasing component sizes, material usages, and energy consumption of products. The development of nanomanufacturing technologies are highly desired to achieve nanoprecision and resolution to realize the novel functionality and properties of miniaturization, nanomaterial, and nanostructures [4]. Lasers have provided important opportunities in the realization of nanomanufacturing, and laser-based manufacturing of nanomaterials has shown advantages in narrow size distribution, excellent material property, yield, and purity. For example, laser deposition techniques can allow the generation and growth of nanomaterials at a particular location of a substrate, making them very flexible for device manufacturing. Laser-based materials processing has been successfully applied in industry for several decades such as laser-based additive manufacturing, surface modification, and micromachining.
