Development of an innovative sensor for measuring two degree-of-freedom motions of single-axis linear nanopositionoing stage Conference Paper uri icon

published proceedings

  • Proceedings - 32nd ASPE Annual Meeting

author list (cited authors)

  • Zolfaghari, A., Jeon, S., Kim, G. H., & Lee, C. B.

complete list of authors

  • Zolfaghari, A||Jeon, S||Kim, GH||Lee, CB

publication date

  • January 2016