Dicing wheel wear monitoring technique utilizing edge diffraction effect Academic Article uri icon

abstract

  • © 2018 Elsevier Ltd This paper presents a non-contact, convenient, efficient cutting tool wear monitoring technique of dicing wheel based on an edge diffraction effect. Dicing is a standard technology for fabricating components of micro-electromechanical systems, and the wear of dicing wheels may influence the components’ quality with respect to cutting-surface quality and subsurface damage. Based on the edge diffraction principle that utilizes interference of transmitted wave and a diffracted wave at the wheel end, the diffraction patterns according to dicing wheel conditions were scanned, and cross-correlation was used to extract attrition and abrasive wear from the measured diffraction patterns. Attrition and abrasive wear were related with lag and similarity coefficients of cross-correlation, respectively. This measurement technique can be used for on-machine or in-process monitoring of wheel conditions or wheel radius compensation and can be included in dicing parameter optimization process.

author list (cited authors)

  • Jeon, S., Zolfaghari, A., & Lee, C.

publication date

  • January 1, 2018 11:11 AM