Materials processing with a tightly focused femtosecond laser vortex pulse.
Additional Document Info
In this Letter we present the first (to our knowledge) demonstration of material modification using tightly focused single femtosecond laser vortex pulses. Double-charge femtosecond vortices were synthesized with a polarization-singularity beam converter based on light propagation in a uniaxial anisotropic medium and then focused using moderate- and high-NA optics (viz., NA=0.45 and 0.9) to ablate fused silica and soda-lime glass. By controlling the pulse energy, we consistently machine micrometer-size ring-shaped structures with <100nm uniform groove thickness.