Mid-infrared Photonic Chips for Real-time Gas Mixture Analysis Conference Paper uri icon


  • OSA 2018. Real-time gas analysis on-a-chip was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures for the microcavity were made of ultrathin silicate membranes embedded in a silicon chip using the complementary metal-oxide-semiconductor (CMOS) process. CH4, CO2, and N2O were selected as analytes due to their strong absorption bands at = 3.25-3.50 m, 4.20-4.35 m.

name of conference

  • Conference on Lasers and Electro-Optics

published proceedings

  • Conference on Lasers and Electro-Optics

author list (cited authors)

  • Jin, T., & Lin, P. T.

citation count

  • 1

complete list of authors

  • Jin, Tiening||Lin, Pao Tai

publication date

  • January 2018