Characterization of Nanoindentations in Silicon by Cross-sectional TEM Conference Paper

abstract

• Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 15, 2004.

authors

• Pharr, George

published proceedings

• Microscopy and Microanalysis

author list (cited authors)

• Wen, S., Bentley, J., Jang, J., Anderson, I. M., & Pharr, G. M.

citation count

• 0

complete list of authors

• Wen, Songqing||Bentley, James||Jang, Jae-il||Anderson, Ian M||Pharr, George M

publication date

• January 2004

publisher

• Oxford University Press (OUP)  Publisher

published in

• Microscopy and Microanalysis  Journal

Digital Object Identifier (DOI)

• 10.1017/s1431927604882709

start page

• 56

end page

• 57

volume

• 10

issue

• S02

URL

• http://dx.doi.org/10.1017/s1431927604882709