Characterization of Nanoindentations in Silicon by Cross-sectional TEM Conference Paper uri icon


  • Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

author list (cited authors)

  • Wen, S., Bentley, J., Jang, J., Anderson, I. M., & Pharr, G. M.

citation count

  • 0

publication date

  • August 2004