Microstructures and mechanical properties of thin films of aluminum oxide Academic Article uri icon

published proceedings

  • Scripta Metallurgica et Materialia

author list (cited authors)

  • Chou, T. C., Nieh, T. G., McAdams, S. D., & Pharr, G. M.

citation count

  • 69

complete list of authors

  • Chou, TC||Nieh, TG||McAdams, SD||Pharr, GM

publication date

  • October 1991