Microstructures and mechanical properties of thin films of aluminum oxide
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Scripta Metallurgica et Materialia
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Chou, T. C., Nieh, T. G., McAdams, S. D., & Pharr, G. M.
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Chou, TC||Nieh, TG||McAdams, SD||Pharr, GM
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http://dx.doi.org/10.1016/0956-716x(91)90001-h